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To improve the accuracy of three-dimensional (3D) surface contour measurements of freeform optics, a two-dimensional (2D) tilt measurement sensor for confocal microscopy (CM) systems is proposed based on a double-cylindrical mirror structure. First, the proposed system is accurately modeled. Second, we introduce a modified mean-shift-based peak-extraction algorithm with a novel kernel function (MSN) because the reflectivity of the measured object and fluctuation of the light source affect the measurement accuracy. Third, a partition fitting (PF) strategy is proposed to reduce the fitting error and improve the measurement accuracy. Simulations and experiments reveal that the robustness, speed, and angular prediction accuracy of the system effectively improved as a function of MSN and PF. The developed sensor can measure the 2D tilt, where each tilt is a composition of two separate dimensions, and the mean prediction errors in the 2D plane from -10°-+10° are 0.0134° (0.067% full scale (F.S)) and 0.0142° (0.071% F.S). The sensor enables the optical probe of a traditional CM to obtain accurate and simultaneous estimates of the 2D inclination angle and spatial position coordinates of the measured surface. The proposed sensor has potential in 3D topographic reconstruction and dynamic sampling rate optimization for 3D contour detection.

sensors

Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System