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The eddy-current (EC) testing method is frequently utilized in the nondestructive inspection of conductive materials. To detect the minor and complex-shaped defects on the surface and in the underlying layers of a metallic sample, a miniature eddy-current probe with high sensitivity is preferred for enhancing the signal quality and spatial resolution of the obtained eddy-current images. In this work, we propose a novel design of a miniature eddy-current probe using a giant magnetoresistance (GMR) sensor fabricated on a silicon chip. The in-house-made GMR sensor comprises two cascaded spin-valve elements in parallel with an external variable resistor to form a Wheatstone bridge. The two elements on the chip are excited by the alternating magnetic field generated by a tiny coil aligned to the position that balances the background output of the bridge sensor. In this way, the two GMR elements behave effectively as an axial gradiometer with the bottom element sensitive to the surface and near-surface defects on a conductive specimen. The performance of the EC probe is verified by the numerical simulation and the corresponding experiments with machined defects on metallic samples. With this design, the geometric characteristics of the defects are clearly visualized with a spatial resolution of about 1 mm. The results demonstrate the feasibility and superiority of the proposed miniature GMR EC probe for characterizing the small and complex-shaped defects in multilayer conductive samples.

Detection of Surface and Subsurface Flaws with Miniature GMR-Based Gradiometer