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The visual dimension measurement method based on non-splicing single lens has the contradiction between accuracy and range of measurement, which cannot be considered simultaneously. In this paper, a multi-camera cooperative measurement method without mechanical motion is proposed for the dimension measurement of thin slice workpiece. After the calibration of the multi-camera imaging system is achieved through a simple and efficient scheme, the high-precision dimension measurement with a large field of view can be completed through a single exposure. First, the images of the edges of the workpiece are compressed and combined by splitting and merging light through the multi-prism system, and the results are distributed to multiple cameras by changing the light path. Then, the mapping relationship between the global measurement coordinates and the image coordinates of each camera is established based on the globally unique M-array coding, and the image distortion is corrected by the coding unit composed of black and white blocks. Finally, the edge is located accurately by edge point detection at the sub-pixel level and curve fitting. The results of measuring a test workpiece with the dimension of 24 mm × 12 mm × 2 mm through a single exposure show that the repeated measurement accuracy can reach 0.2 µm and the absolute accuracy can reach 0.5 µm. Compared with other methods, our method can achieve the large-field measurement through only one exposure and without the mechanical movement of cameras. The measurement precision is higher and the speed is faster.

High Precision Visual Dimension Measurement Method with Large Range Based on Multi-Prism and M-Array Coding