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Electromagnetic eddy current sensors are commonly used to identify and quantify the surface notches of metals. However, the unintentional tilt of eddy current sensors affects results of size profiling, particularly for the depth profiling. In this paper, based on the eddy current thin-skin regime, a revised algorithm has been proposed for the analytical voltage or impedance of a tilted driver-pickup eddy current sensor scanning across a long ideal notch. Considering the resolution of the measurement, the bespoke driver-pickup, also termed as transmitter-receiver (T-R) sensor is designed with a small mean radius of 1 mm. In addition, the T-R sensor is connected to the electromagnetic instrument and controlled by a scanning stage with high spatial travel resolution, with a limit of 0.2 μm and selected as 0.25 mm. Experiments were conducted for imaging of an aluminium sheet with seven machined long notches of different depths using T-R sensor under different tilt angles. By fitting the measured voltage (both real and imaginary part) with proposed analytical algorithms, the depth profiling of notches is less affected by the tilt angle of sensors. From the results, the depth of notches can be retrieved within a deviation of 10% for tilt angles up to 60 degrees.

Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor