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In this paper, we propose a novel design and optimization environment for inertial MEMS devices based on a computationally efficient schematization of the structure at the a device level. This allows us to obtain a flexible and efficient design optimization tool, particularly useful for rapid device prototyping. The presented design environment— feMEMSlite —handles the parametric generation of the structure geometry, the simulation of its dynamic behavior, and a gradient-based layout optimization. The methodology addresses the design of general inertial MEMS devices employing suspended proof masses, in which the focus is typically on the dynamics associated with the first vibration modes. In particular, the proposed design tool is tested on a triaxial beating-heart MEMS gyroscope, an industrially relevant and adequately complex example. The sensor layout is schematized by treating the proof masses as rigid bodies, discretizing flexural springs by Timoshenko beam finite elements, and accounting for electrostatic softening effects by additional negative spring constants. The MEMS device is then optimized according to two possible formulations of the optimization problem, including typical design requirements from the MEMS industry, with particular focus on the tuning of the structural eigenfrequencies and on the maximization of the response to external angular rates. The validity of the proposed approach is then assessed through a comparison with full FEM schematizations: rapidly prototyped layouts at the device level show a good performance when simulated with more complex models and therefore require only minor adjustments to accomplish the subsequent physical-level design.

Rapid Prototyping of Inertial MEMS Devices through Structural Optimization