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We theoretically explore the potential of Si 3 N 4  on SiO 2  waveguide platform toward a wideband spectroscopic detection around the optical wavelength of 2 μm. The design of Si 3 N 4  on SiO 2  waveguide architectures consisting of a Si 3 N 4  slot waveguide for a wideband on-chip spectroscopic sensing around 2 μm, and a Si 3 N 4  multi-mode interferometer (MMI)-based coupler for light coupling from classical strip waveguide into the identified Si 3 N 4  slot waveguides over a wide spectral range are investigated. We found that a Si 3 N 4  on SiO 2  slot waveguide structure can be designed for using as optical interaction part over a spectral range of interest, and the MMI structure can be used to enable broadband optical coupling from a strip to the slot waveguide for wideband multi-gas on-chip spectroscopic sensing. Reasons for the operating spectral range of the system are discussed.

Design and Simulation Investigation of Si3N4 Photonics Circuits for Wideband On-Chip Optical Gas Sensing around 2 µm Optical Wavelength