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We considered the effect of coverage of the surface of In 2 O 3 films with rhodium on the sensitivity of their electrophysical properties to ozone (1 ppm). The surface coverage with rhodium varied in the range of 0-0.1 ML. The In 2 O 3 films deposited by spray pyrolysis had a thickness of 40-50 nm. The sensor response to ozone depends on the degree of rhodium coverage. This dependence has a pronounced maximum at a coverage of ~0.01 ML of Rh. An explanation is given for this effect. It is concluded that the observed changes are associated with the transition from the atomically dispersed state of rhodium to a 3D cluster state.

Ozone Sensing by In2O3 Films Modified with Rh: Dimension Effect