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A measurement system for the detection of a low concentration of nanoparticles based on optical microcavities with whispering-gallery modes (WGMs) is developed and investigated. A novel method based on the WGM broadening allows us to increase the precision of concentration measurements up to 0.005 ppm for nanoparticles of a known size. We describe WGM microcavity manufacturing and quality control methods. The collective interaction process of suspended Ag nanoparticles in a liquid and TiO 2 in the air with a microcavity surface is studied.

The Measurement of Nanoparticle Concentrations by the Method of Microcavity Mode Broadening Rate