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A design rule for a Mach-Zehnder interferometer (MZI) sensor is presented, allowing tunable sensitivity by appropriately choosing the MZI arm lengths according to the formula given in this paper. The present MZI sensor designed by this method can achieve an ultra-high sensitivity, which is much higher than any other traditional MZI sensors. An example is given with silicon-on-insulator (SOI) nanowires and the device sensitivity is as high as 10 6 nm/refractive-index -unit (or even higher), by choosing the MZI arms appropriately. This makes it possible for one to realize a low-cost optical sensing system with a detection limit as high as 10 -6 refractive-index-unit, even when a cheap optical spectrum analyzer with low-resolution (e.g., 1 nm) is used for the wavelength-shift measurement.

Design Rule of Mach-Zehnder Interferometer Sensors for Ultra-High Sensitivity