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A high-precision acceleration measurement system based on an ultra-sensitive tunnel magneto-resistance (TMR) sensor is presented in this paper. A "force-magnetic-electric" coupling structure that converts an input acceleration into a change in magnetic field around the TMR sensor is designed. In such a structure, a micro-cantilever is integrated with a magnetic field source on its tip. Under an acceleration, the mechanical displacement of the cantilever causes a change in the spatial magnetic field sensed by the TMR sensor. The TMR sensor is constructed with a Wheatstone bridge structure to achieve an enhanced sensitivity. Meanwhile, a low-noise differential circuit is developed for the proposed system to further improve the precision of the measured acceleration. The experimental results show that the micro-system achieves a measurement resolution of 19 μg/√Hz at 1 Hz, a scale factor of 191 mV/g within a range of ± 2 g, and a bias instability of 38 μg (Allan variance). The noise sources of the proposed system are thoroughly investigated, which shows that low-frequency 1/f noise is the dominant noise source. We propose to use a high-frequency modulation technique to suppress the 1/f noise effectively. Measurement results show that the 1/f noise is suppressed about 8.6-fold at 1 Hz and the proposed system resolution can be improved to 2.2 μg/√Hz theoretically with this high-frequency modulation technique.

High-Precision Acceleration Measurement System Based on Tunnel Magneto-Resistance Effect