English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Tools annual

Global: Zendy Free Plan

Global: Zendy Tools monthly

Global: Zendy Plus monthly

Monte Carlo analyses on statistical volume elements allow quantifying the effect of polycrystalline morphology, in terms of grain topology and orientation, on the scattering of the elastic properties of polysilicon springs. The results are synthesized through statistical (lognormal) distributions depending on grain size and morphology: such statistical distributions are an accurate and manageable alternative to numerically-burdensome analyses. Together with this quantification of material property uncertainties, the effect of the scattering of the over-etch on the stiffness of the supporting springs can also be accounted for, by subdividing them into domains wherein statistical fluctuations are assumed not to exist. The effectiveness of the proposed stochastic approach is checked with the problem of the quantification of the offset from the designed configuration, due to the residual stresses, for a statically-indeterminate MEMS structure made of heterogeneous (polycrystalline) material.

Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures