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Self-controlled active oscillating microcantilevers with a piezoresistive readout are very promising sensitive sensors, despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with copper hydroxide (Cu(OH)₂) or with copper oxide (CuO) nanorods. The Cu(OH)₂ rods were grown, on a homogeneous copper layer previously evaporated on the top of the cantilever. The CuO nanorods were further obtained by the annealing of the copper hydroxide nanostructures. Then, these copper based nanorods were used to detect several molecules vapors. The results showed no chemical affinity (no formation of a chemical bond) between the CuO cantilevers and the tested molecules. The cantilever with Cu(OH)₂ nanorods is selective to nitrogen dioxide (NO₂) in presence of humidity. Indeed, among all the tested analytes, copper hydroxide has only an affinity with NO₂. Despite the absence of affinity, the cantilevers could even so condensate explosives (1,3,5-trinitro-1,3,5-triazinane (RDX) and pentaerythritol tetranitrate (PETN) on their surface when the cantilever temperature was lower than the explosives source, allowing their detection. We proved that in condensation conditions, the cantilever surface material has no importance and that the nanostructuration is useless because a raw silicon cantilever detects as well as the nanostructured ones.

Cu(OH)2 and CuO Nanorod Synthesis on Piezoresistive Cantilevers for the Selective Detection of Nitrogen Dioxide