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A microsized slit-embedded cantilever sensor (slit cantilever) was fabricated and evaluated as a biosensing platform in a liquid environment. In order to minimize the degradation caused by viscous damping, a 300 × 100 µm² (length × width) sized cantilever was released by a 5 µm gap-surrounding and vibrated by an internal piezoelectric-driven self-actuator. Owing to the structure, when the single side of the slit cantilever was exposed to liquid a significant quality factor (Q = 35) could be achieved. To assess the sensing performance, the slit cantilever was exploited to study the biophysical kinetics related to Aβ peptide. First, the quantification of Aβ peptide with a concentration of 10 pg/mL to 1 μg/mL was performed. The resonant responses exhibited a dynamic range from 100 pg/mL to 100 ng/mL (-56.5 to -774 ΔHz) and a dissociation constant (K D ) of binding affinity was calculated as 1.75 nM. Finally, the Aβ self-aggregation associated with AD pathogenesis was monitored by adding monomeric Aβ peptides. As the concentration of added analyte increased from 100 ng/mL to 10 µg/mL, both the frequency shift values (-813 to -1804 ΔHz) and associate time constant increased. These results showed the excellent sensing performance of the slit cantilever overcoming a major drawback in liquid environments to become a promising diagnostic tool candidate.

Study of Alzheimer’s Disease-Related Biophysical Kinetics with a Microslit-Embedded Cantilever Sensor in a Liquid Environment