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In this paper, we report attenuation characteristics of aluminum nitride (AIN) film-based surface acoustic waves (SAWs) in liquids and their potential as liquid ethanol sensors. An AIN film-based SAW resonator was fabricated for liquid sensing application. The fabricated SAW device had a Rayleigh wave mode at a resonant frequency of 147.1 MHz and a low temperature coefficient of frequency (TCF) of -21.7 ppm/K. The signal attenuation in the transmission line of the SAW device was presented when ethanol (ETH) droplets and deionized water (DIW) with different concentrations and volume (0.2-1 µL) were dropped on the sensing area respectively. The attenuation of SAW as a function of time and liquid position was investigated. Residues left on the wave propagation path resulted in a frequency shift of the SAW device after liquid evaporation. For ETH, there was a 49 kHz frequency shift caused by a large amount of residues, while the frequency shift of DIW was not distinct, on account of a clean surface. The linear relationship between evaporation rate and ethanol concentration was demonstrated. The evaporation rate of ethanol droplets showed good consistency, and the evaporation time variation was less than 5% at each concentration level. Therefore, the proposed SAW device had great potentials to determine ethanol concentrations based on evaporation rate.

A Study on AIN Film-Based SAW Attenuation in Liquids and Their Potential as Liquid Ethanol Sensors