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To address the bottleneck issues of an elastic-style six-axis force/torque sensor (six-axis force sensor), this work proposes a no-elastic piezoelectric six-axis force sensor. The operating principle of the piezoelectric six-axis force sensor is analyzed, and a structural model is constructed. The static-active design theory of the piezoelectric six-axis force sensor is established, including a static analytical/mathematical model and numerical simulation model (finite element model). A piezoelectric six-axis force sensor experimental prototype is developed according to the analytical mathematical model and numerical simulation model, and selected static characteristic parameters (including sensitivity, isotropic degree and cross-coupling) are tested using this model with three approaches. The measured results are in agreement with the analytical results from the static-active design method. Therefore, this study has successfully established a foundation for further research into the piezoelectric multi-axis force sensor and an overall design approach based on static characteristics.

Active Design Method for the Static Characteristics of a Piezoelectric Six-Axis Force/Torque Sensor