English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Tools annual

Global: Zendy Free Plan

Global: Zendy Tools monthly

Global: Zendy Plus monthly

For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors' thermal performance should be considered during sensor design. The radiative heat flux is transferred from a membrane to a plane or from a membrane to a membrane. In the current study of the near-field thermal radiation, the scanning probe technology has difficulty in making a membrane separated at micron scale parallel to a plane or another membrane. A novel MEMS (micro electromechanical system) device was developed by sacrificial layer technique in this work to realize a double parallel freestanding membrane structure. Each freestanding membrane has a platinum thin-film resistor and the distance between the two membranes is 1 m. After evaluating the electrical and thermal characteristics of the lower freestanding membrane, experimental measurements of near-field radiative heat transfer between the lower membrane and the upper membrane were carried out by setting the lower membrane as a heat emitter and the upper membrane as a heat receiver. The near-field radiative heat transfer between the two membranes was validated by finding a larger-than-blackbody radiative heat transfer based on the experimental data.

A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes