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We present a fully coupled multi-energy domain compact model of a MEMS microphone dedicated to the investigation of acoustic high-frequency effects affecting the device behavior. To this end, the components of the acoustic domain are described using physics-derived analytical expressions. Finite element simulations are employed to confirm the validity of the acoustic submodel. The differential equations governing the small-signal dynamics of the electrically actuated transducer are solved in the frequency domain with MATLAB. The full-system model is calibrated and validated with experimental data. Measurements and simulations show very good agreement, which highlights the reliability of the presented modeling approach.

Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers