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This paper presents the NDIR CO2 gas sensor that has improved the sensitivity and also the accuracy by the deposition of thin hydrophobic film (Parylene-C film with 0.5 micrometer thick) onto the reflector surfaces of White-cell structure. After deposition of hydrophobic thin film, the sensitivity of sensor has been increased with averaged 10% and the estimated errors were reduced within 13 ppm to 143 ppm from 254 K to 324 K temperature ranges and from 0 ppm to 5000 ppm CO2 concentrations.

Enhanced Characteristics of Nondispersive Infrared CO2 Gas Sensor by Deposition of Hydrophobic Thin Film