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A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic analyses. The results of the investigations prove that an undulatory motion of the fin-like micro-flapper yields a significant higher, directed fluidic net flow compared to resonant-like motion. First prototypes have been manufactured and characterized applying laser Doppler vibrometry (LDV).

Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications