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A xenon micro flow control device (XMFCD) is the key component of a xenon feeding system, which controls the required micro flow xenon (µg/s–mg/s) to electric thrusters. Traditional XMFCDs usually have large volume and weight in order to achieve ultra-high fluid resistance and have a long producing cycle and high processing cost. This paper proposes a miniaturized, easy-processing, and inexpensive XMFCD, which is fabricated by low-temperature co-fired ceramic (LTCC) technology. The design of the proposed XMFCD based on complex three-dimensional (3D) microfluidic channels is described, and its fabrication process based on LTCC is illustrated. The microfluidic channels of the fabricated single (9 mm diameter and 1.4 mm thickness) and dual (9 mm diameter and 2.4 mm thickness) XMFCDs were both checked by X-ray, which proved the LTCC method’s feasibility. A mathematical model of flow characteristics is established with the help of finite element analysis, and the model is validated by the experimental results of the single and dual XMFCDs. Based on the mathematical model, the influence of the structure parameters (diameter of orifice and width of the groove) on flow characteristics is investigated, which can guide the optimized design of the proposed XMFCD.

Design, Simulation, and Experiment of an LTCC-Based Xenon Micro Flow Control Device for an Electric Propulsion System