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The spatially-resolved electron temperature, rotational temperature, and number density of the two metastable Ar1 slevels were investigated in a miniature RF Ar glow discharge jet at atmospheric pressure. The1 slevel population densities were determined from optical absorption spectroscopy (OAS) measurements assuming a Voigt profile for the plasma emission and a Gaussian profile for the lamp emission. As for the electron temperature, it was deduced from the comparison of the measured Ar2  p i  → 1  s jemission lines with those simulated using a collisional-radiative model. The Ar1 slevel population higher than 1018m− 3and electron temperature around 2.5 eV were obtained close to the nozzle exit. In addition, both values decreased steadily along the discharge axis. Rotational temperatures determined from OH(A) and N2    (C) optical emission featured a large difference with the gas temperature found from a thermocouple; a feature ascribed to the population of emitting OH and N2states by energy transfer reactions involving the Ar1 slevels.

Spatially-Resolved Spectroscopic Diagnostics of a Miniature RF Atmospheric Pressure Plasma Jet in Argon Open to Ambient Air