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Ag⁻SiO₂ nanomace arrays were prepared on a two-dimensional ordered colloidal (2D) polystyrene sphere template by co-sputtering Ag and SiO₂ in a magnetron sputtering system. The lateral size of the nanomaces and the distance between the neighbor nanomaces were controlled by adjusting the etching time of the 2D template. The nanomaces were composed of SiO₂-isolated Ag nanoparticles, which produced surface-enhanced Raman scattering (SERS) enhancement, and 3D hot spots were created between the neighbor nanomaces. When the distance between the nanomaces was sufficiently large, triangle-shaped nanostructures on silicon substrate were observed, which also contributed to the enhancement of the SERS signals. The finite-difference time-domain (FDTD) method was used to calculate the electromagnetic field distributions in the Ag⁻SiO₂ nanomace arrays, which generated physical reasons for the change of the SERS signals.

Controlling the 3D Electromagnetic Coupling in Co-Sputtered Ag–SiO2 Nanomace Arrays by Lateral Sizes