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Electro-optical tuning metasurfaces are particularly attractive since they open up routes for dynamic reconfiguration. The electro-optic (EO) modulation strength essentially depends on the sensitivity to the EO-induced refractive index changes. In this paper, lithium niobate (LiNbO 3 ) metasurfaces integrated with liquid crystals (LCs) are theoretically investigated. Cylinder arrays are proposed to support quasi-bound states in the continuum (quasi-BICs). The quasi-BIC resonances can significantly enhance the lifetime of photons and the local field, contributing to the EO-refractive index changes. By integrating metasurfaces with LCs, the combined influence of the LC reorientation and the Pockels electro-optic effect of LiNbO 3 is leveraged to tune the transmitted wavelength and phase spectrum around the quasi-BIC wavelength, resulting in an outstanding tuning sensitivity up to Δ λ /Δ V ≈ 0.6 nm/V and relieving the need of high voltage. Furthermore, the proposed structure can alleviate the negative influence of sidewall tilt on device performance. The results presented in this work can foster wide application and prospects for the implementation of tunable displays, light detection and ranging (LiDAR), and spatial light modulators (SLMs).

Electro-Optical Modulation in High Q Metasurface Enhanced with Liquid Crystal Integration