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We propose a high quality-factor (Q-factor) multi-Fano resonance hybrid metamaterial waveguide (HMW) sensor. By ingeniously designing a metal/dielectric hybrid waveguide structure, we can effectively tailor multi-Fano resonance peaks' reflectance spectrum appearing in the visible wavelength range. In order to balance the high Q-factor and the best Fano resonance modulation depth, numerical calculation results demonstrated that the ultra-narrow linewidth resolution, the single-side quality factor, and Figure of Merit (FOM) can reach 1.7 nm, 690, and 236, respectively. Compared with the reported high Q-value (483) in the near-infrared band, an increase of 30% is achieved. Our proposed design may extend the application of Fano resonance in HMW from mid-infrared, terahertz band to visible band and have important research value in the fields of multi-wavelength non-labeled biosensing and slow light devices.

High Q-Factor Hybrid Metamaterial Waveguide Multi-Fano Resonance Sensor in the Visible Wavelength Range