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Yttrium fluoride (YF 3 ) columnar thin films (CTFs) were fabricated by electron beam evaporation with the glancing angle deposition method. The microstructures and optical properties of YF 3 CTFs were studied systematically. The YF 3 films grown at different deposition angles are all amorphous. As the deposition angle increases, the columns in YF 3 CTFs become increasingly separated and inclined, and the volume fraction of YF 3 decreases, resulting in lower refractive indices. This phenomenon is attributed to the self-shadowing effect and limited adatom diffusion. The YF 3 CTFs are optically biaxial anisotropic with the long axis ( c -axis) parallel to the columns, the short axis ( b -axis) perpendicular to the columns, and the other axis ( a -axis) parallel to the film interface. The principal refractive index along the b -axis for the 82°-deposited sample is approximately 1.233 at 550 nm. For the 78°-deposited sample, the differences of principal refractive indices between the c -axis and the b -axis and between the a -axis and the b -axis reach the maximum 0.056 and 0.029, respectively. The differences of principal refractive indices were affected by both the deposition angle and the volume fraction of YF 3 .

Microstructure-Induced Anisotropic Optical Properties of YF3 Columnar Thin Films Prepared by Glancing Angle Deposition