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This paper presents a multi-stage noise shaping (MASH) switched-capacitor (SC) sigma-delta (ΣΔ) analog-to-digital converter (ADC) composed of an analog modulator with an on-chip noise cancellation logic and a reconfigurable digital decimator for MEMS digital gyroscope applications. A MASH 2-1-1 structure is employed to guarantee an absolutely stable modulation system. Based on the over-sampling and noise-shaping techniques, the core modulator architecture is a cascade of three single-loop stages containing feedback paths for systematic optimization to avoid deterioration in conversion accuracy caused by capacitor mismatch. A digital noise cancellation logic is also included to eliminate residual quantization errors in the former two stages, and those in the last stage are shaped by a fourth-order modulation. A multi-rate decimator follows the analog modulator to suit variable gyroscope bandwidth. Manufactured in a standard 0.35 μm CMOS technology, the whole chip occupies an area of 3.8 mm². Experimental results show a maximum signal-to-noise ratio (SNR) of 100.2 dB and an overall dynamic range (DR) of 107.6 dB, with a power consumption of 3.2 mW from a 5 V supply. This corresponds to a state-of-the-art figure-of-merit (FoM) of 165.6 dB.

A High-Dynamic-Range Switched-Capacitor Sigma-Delta ADC for Digital Micromechanical Vibration Gyroscopes