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This paper presents a functional microstructured surface, named Polar Microstructure. Polar microstructure is a three dimensional (3D) structured surface possessing a pattern of distribution of latitude and longitude micro-topographies with geometrical characteristics, which is similar to that in the Earth's north or south pole. The spacing of its small surface features can achieve form accuracy at the micrometer level. Polar microstructure has great potential for applications in precision measurement of angle displacement based on the characteristics of its surface features. This paper presents the development of a machining process chain system that integrates single point diamond turning (SPDT) and diamond broaching together to fabricate polar microstructure. A framework of a machining process chain system is presented which is composed of input module, design module, simulation module, output module, and metrology module. After that, modeling of the machining process chain composed of SPDT and diamond broaching is built up. The model takes into consideration the initial surface topography of the workpiece. Simulations have been conducted to obtain the optimal machining parameters in each machining process. A series of experiments was conducted for the ultra-precision machining of various types of polar microstructures. The machining results show that the machining process chain system is technically feasible and effective in the precision manufacturing of polar microstructure. The experimental results agree well with the simulated results.

Modeling and Simulation of a Machining Process Chain for the Precision Manufacture of Polar Microstructure