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A two-dimensional (2D) magnetic field sensor consisting of four silicon magnetic sensitive transistors (SMSTs) with similar characteristics is presented in this paper. By use of micro-electromechanical systems (MEMS) and integrated packaging technology, this sensor fabricated by using the silicon wafer with a <100> orientation and high resistivity, was packaged on printed circuit boards (PCBs). In order to detect the magnetic fields in the  x  and  y  axes directions, two of the four SMSTs with opposite magnetic sensitive directions were located along the  x  and − x  axes directions, symmetrically, and the others were located along the  y  and − y  axes directions. The experimental results show that when the  V  CE  = 10.0 V and  I  B  = 6.0 mA, the magnetic sensitivities of the sensor in the  x  and  y  axes directions are 366.0 mV/T and 365.0 mV/T, respectively. It is possible to measure the 2D magnetic field and improve the magnetic sensitivity, significantly.

Two-Dimensional Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors with Differential Structure