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Temperature induced frequency shifts may compromise the sensor response of polymer coated acoustic wave gas-phase sensors operating in environments of variable temperature. To correct the sensor data with the temperature response of the sensor the latter must be known. This study presents and discusses temperature frequency characteristics (TFCs) of solid hexamethyldisiloxane (HMDSO) polymer coated sensor resonators using the Rayleigh surface acoustic wave (RSAW) mode on ST-cut quartz. Using a RF-plasma polymerization process, RSAW sensor resonators optimized for maximum gas sensitivity have been coated with chemosensitive HMDSO films at 4 different thicknesses: 50, 100, 150 and 250 nm. Their TFCs have been measured over a (−100 to +110) °C temperature range and compared to the TFC of an uncoated device. An exponential 2,500 ppm downshift of the resonant frequency and a 40 K downshift of the sensor’s turn-over temperature (TOT) are observed when the HMDSO thickness increases from 0 to 250 nm. A partial temperature compensation effect caused by the film is also observed. A third order polynomial fit provides excellent agreement with the experimental TFC curve. The frequency downshift due to mass loading by the film, the TOT and the temperature coefficients are unambiguously related to each other

micromachines

Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications