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Free-form microhemispherical shell resonators have the advantages of high quality factor and mass production. The shape of microhemispherical shells created via this process is based on a single mold and is difficult to adjust, which affects the resonant frequency and quality factor. In this paper, a process analysis model is established through in-depth analysis of the process mechanism and flow of the free-forming method. Based on this model, the influence of the designed preforming parameters on the shape, resonant frequency and thermoelastic dissipation of the microhemispherical shell are analyzed in detail, providing theoretical guidance for parameter design. The results show that the depth and the ratio of internal to external pressure of the substrate's annular groove affect the height and thickness of the microhemispherical shell, and the structural thickness affects the thickness of the microhemispherical shell; these in turn affect the resonant frequency and thermoelastic dissipation of the microhemispherical shell resonator. In addition, the inner diameter of the substrate's annular groove mainly affects the radius of the support column of the microhemispherical shell, and the influence on the resonant frequency and thermoelastic dissipation of the resonator is relatively low.

Shape, Resonant Frequency and Thermoelastic Dissipation Analysis of Free-Formed Microhemispherical Shells Based on Forming Process Modeling