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Revealing forming mechanism of workpiece surface topography plays an important role in improving ultraprecision turning. In this paper, the forming mechanism of the turning workpiece surface topography is analyzed and verified by the theoretical simulation and experiment respectively. First, the factors directly related to the turning process are analyzed, and a volumetric error model is built and discussed, which considered geometric errors, tool geometry, spindle vibrations, feed rate, cut depth, and feed system position change. The vibration mechanism and laws of the spindle system under multi-field coupling is analyzed, and the effect of the spindle axial vibration on the turning surface topography is studied. In addition, influence of coupled vibrations on the turning surface texture is analyzed, and an equivalent machining model is constructed to identify crucial geometric errors of the workpiece surface topography. Finally, a homemade ultraprecision machine tool system is built and used for turning the workpiece surface, and the tested results of the surface topography demonstrate Ra is better, 10 nm and Rv is better, 20 nm. The end face of the workpiece forms periodically fluctuating wave and ripple patterns, and the comparison between theoretical analysis and experimental detection of the surface topography is verified.

Investigation on the Micro Cutting Mechanism and Surface Topography Generation in Ultraprecision Diamond Turning