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Energy harvesters are devices that accumulate ambient vibrational energy from the environment, and for the time being, variable capacitance is the most widely used mechanism. Various designs were proposed to increase the power of such devices, and in particular, the interdigitated electrode (IDE) pattern is the mainstream. Nevertheless, most IDE designs focus merely on the parallel-type vibrations of electrodes. In this study, the performance of a novel harvester, which combined circular membrane and interdigitated ring electrodes (IRE), was investigated. This design allows the device to collect energy from the rotational structure motions of electrodes through the vibrating membrane. Besides, the circular structure provides a dense capacitive arrangement that is higher than that of the arrangement obtained using regular rectangular chips. The IRE diagram is composed of many capacitive rings, each of which harvests vibrated energy simultaneously. Three gaps (1, 10, and 100 μm) of the ring are investigated for the first four vibrational modes of the membrane to understand the effect of energy output. It is found that the energy outputs are approximately the same for the three gaps; however, rings with a wider gap are easier to manufacture in MEMS.

An Analytical Energy Harvester Model for Interdigitated Ring Electrode on Circular Elastic Membrane