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This paper proposes a feedforward and feedback combined hysteresis compensation method for a piezoelectric actuator (PEA) based on the multi-layer feedforward neural network (MFNN) inverse model. Under the scheme of direct inverse modeling, the MFNN is utilized as the feedforward hysteresis compensator, which can be directly identified from the measurements. The high modeling accuracy and high robustness of the MFNN help to increase the bandwidth of the closed-loop system. Experiments are conducted on a commercial PEA so as to verify the effectiveness of the proposed method. The superimposition of two sinusoidal signals is found to be efficient for the training of the MFNN. Closed-loop trajectory tracking experiments demonstrate that the bandwidth can be increased up to 1000 Hz and the maximum deviation can be maintained closed to the noise level. Meanwhile, there are only two parameters to be tuned in the proposed method, which guarantees ease of use for the inexperienced users. The proposed method successfully realizes high-precision hysteresis compensation performance across a wider frequency range.

High-Bandwidth Hysteresis Compensation of Piezoelectric Actuators via Multilayer Feedforward Neural Network Based Inverse Hysteresis Modeling