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This study analyzed the characteristics of a small reciprocating pump with a cantilever valve driven by a piezo actuator. Three types of valves were fabricated to investigate the effect of the valve stiffness on the pump performance and to measure the variation in the flow rate according to the frequency. The flow rate increased with the driving frequency until a certain frequency was reached, and then it started to decrease. The rise in the pressure of the pump was found to increase as the stiffness decreased. The pump performance could be clearly distinguished according to the stiffness of the valve. The observation of the valve movements revealed that the valve opening time did not change regardless of the operating frequency, but it changed with the valve stiffness. The delay in time for the outlet valve increased significantly with an increase in the frequency. It seems that the overlap of the opening time of the inlet valve and the outlet valve plays an important role in pump performance. Therefore, it is advisable to use different designs for the inlet and outlet valves, where the shape and stiffness of the valve are adjusted.

Analysis of Stiffness Effect on Valve Behavior of a Reciprocating Pump Operated by Piezoelectric Elements