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Metasurfaces of gold (Au) nanoparticles on a SiO2-Si substrate were fabricated for the enhancement of second harmonic generation (SHG) using electron beam lithography and lift-off. Triangular Au nanoprisms which are non-centro-symmetric and support second-order nonlinearity were examined for SHG. The thickness of the SiO2 spacer is shown to be an effective parameter to tune for maximising SHG. Electrical field enhancement at the fundamental wavelength was shown to define the SHG intensity. Numerical modeling of light enhancement was verified by experimental measurements of SHG and reflectivity spectra at the normal incidence. At the plasmonic resonance, SHG is enhanced up to ∼3.5 × 103 times for the optimised conditions.

Second Harmonic Generation from Phase-Engineered Metasurfaces of Nanoprisms