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Giant magnetostrictive actuators (GMA) are widely used in the field of servo valves, but the displacement of GMA is limited, which renders meeting the requirements of large flow direct-drive electro-hydraulic servo valves (DDV) difficult. In order to solve these problems, this study proposes a double-row bow-type micro-displacement amplifier (DBMA), used to increase output displacement of GMA to meet the requirements. This study, by static analysis, analyzes the force of a flexure hinge based on theoretical mechanics and material mechanics, derives the stiffness matrix of the flexure hinge by the influence coefficient method, establishes the pseudo-rigid model, and derives the amplification ratio of a DBMA. Also, by kinetic analysis, using Castigliano's second theorem, a formula of equivalent stiffness and natural frequency of DBMA were derived and the influences of different parameters on them were analyzed, respectively. After that, we analyzed the amplifier using finite element method (FEM) simulation software and verified the model by manufacturing a prototype and building a test system. Theoretical calculations and experimental results showed that the amplification ratio of the DBMA fluctuated between 15.43 and 16.25. The natural frequency was about 305 Hz to 314 Hz and the response bandwidth was up to 300 Hz. The error among the theoretical, simulated, and experimental values was within 8%, supporting the accuracy of the model.

Modeling and Experimental Study of Double-Row Bow-Type Micro-Displacement Amplifier for Direct-Drive Servo Valves