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As an important means to protect water resources, water quality detection is of great social and economic significance. Water quality detection sensors processed by micro-electro-mechanical system (MEMS) technology have the advantages of low-cost, small size, and high sensitivity. In this paper, a multi-parameter water quality detection integrated sensor chip is further studied, and a portable detection system using this chip is developed. Temperature, pH, oxidation-reduction potential (ORP), conductivity and concentration of copper ions (Cu 2+ ) are selected as typical water quality parameters. Experiments of sensor calibrations using this portable detection system were performed in standard solutions. The sensor has a sensitivity of -57.34 mV/pH in pH detection and 5.95 Ω/°C in temperature response. ORP is directly detected by Pt microelectrode on the chip and the relative error is less than 3%. The electrode constant of the sensor is 1.416 cm -1 and the linearity is 0.9995 in conductivity detection. With the gold nanoparticles deposited on the electrode, the detection peak of Cu 2+ appears at 280 mV and the sensor shows good linearity to the concentration of Cu 2+ in the range of 0-0.6 mg/L. The detection limit of Cu 2+ concentration is 2.33 μg/L. Through measurement and calculation, the accuracy of the portable system is within 4%. This portable multi-parameter water quality detection system with the MEMS-based integrated chip shows great potential in the field and fast detection.

A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection