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The probe-type and substrate-type ultrasonic micro/nano manipulation systems have proven to be two kinds of powerful tools for manipulating micro/nanoscale materials. Numerical simulations of acoustofluidic fields in these two kinds of systems can not only be used to explain and analyze the physical mechanisms of experimental phenomena, but also provide guidelines for optimization of device parameters and working conditions. However, in-depth quantitative study and analysis of acoustofluidic fields in the two ultrasonic micro/nano manipulation systems have scarcely been reported. In this paper, based on the finite element method (FEM), we numerically investigated the two-dimensional (2D) axisymmetric acoustofluidic fields in the probe-type and substrate-type ultrasonic micro/nano manipulation systems by the perturbation method (PM) and Reynolds stress method (RSM), respectively. Through comparing the simulation results computed by the two methods and the experimental verifications, the feasibility and reasonability of the two methods in simulating the acoustofluidic fields in these two ultrasonic micro/nano manipulation systems have been validated. Moreover, the effects of device parameters and working conditions on the acoustofluidic fields are clarified by the simulation results and qualitatively verified by the experiments.

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Modeling and Analysis of the Two-Dimensional Axisymmetric Acoustofluidic Fields in the Probe-Type and Substrate-Type Ultrasonic Micro/Nano Manipulation Systems