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The microvalve for accurate flow control under low fluidic pressure is vital in cost-effective and miniaturized microfluidic devices. This paper proposes a novel microfluidic passive valve comprising of a liquid chamber, an elastic membrane, and an ellipsoidal control chamber, which actualizes a high flow rate control under an ultra-low threshold pressure. A prototype of the microvalve was fabricated by 3D printing and UV laser-cutting technologies and was tested under static and time-dependent pressure conditions. The prototype microvalve showed a nearly constant flow rate of 4.03 mL/min, with a variation of ~4.22% under the inlet liquid pressures varied from 6 kPa to 12 kPa. In addition, the microvalve could stabilize the flow rate of liquid under the time-varying sinusoidal pressures or the square wave pressures. To validate the functionality of the microvalve, the prototype microvalve was applied in a gas-driven flow system which employed an air blower or human mouth blowing as the low-cost gas source. The microvalve was demonstrated to successfully regulate the steady flow delivery in the system under the low driving pressures produced by the above gas sources. We believe that this new microfluidic passive valve will be suitable for controlling fluid flow in portable microfluidic devices or systems of wider applications.

Microfluidic Passive Valve with Ultra-Low Threshold Pressure for High-Throughput Liquid Delivery