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The aerodynamic lubrication performance of gas microbearing has a particularly critical impact on the stability of the bearing-rotor system in micromachines. Based on the Duwensee's slip correction model and the fractal geometry theory, the interactive effects of gas rarefaction and surface roughness on the static and dynamic characteristics were investigated under various operation conditions and structure parameters. The modified Reynolds equation, which governs the gas film pressure distribution in rough bearing, is solved by employing the partial derivative method. The results show that high values of the eccentricity ratio and bearing number tend to increase the principal stiffness coefficients significantly, and the fractal roughness surface considerably affects the ultra-thin film damping characteristics compared to smooth surface bearing.

Interactive Effects of Rarefaction and Surface Roughness on Aerodynamic Lubrication of Microbearings