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A method was developed to fabricate spherical Mo5Si3 powder by milling and spheroidizing using inductively coupled thermal plasma. A Mo5Si3 alloy ingot was fabricated by vacuum arc melting, after which it was easily pulverized into powder by milling due to its brittle nature. The milled powders had an irregular shape, but after being spheroidized by the thermal plasma treatment, they had a spherical shape. Sphericity was increased with increasing plasma power. After plasma treatment, the percentage of the Mo3Si phase had increased due to Si evaporation. The possibility of Si evaporation was thermodynamically analyzed based on the vapor pressure of Mo and Si in the Mo5Si3 liquid mixture. By this process, spherical Mo silicide powders with high purity could be fabricated successfully.

Preparation of Spherical Mo5Si3 Powder by Inductively Coupled Thermal Plasma Treatment