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The paper proposes the automated optimal design of a class of micro–electro–mechanical (MEMS) devices, based on a procedure of finite element analysis coupled to evolutionary optimization algorithms. A magnetic MEMS, used as an optical switch, is considered as the case study. In particular, the geometry of the device is optimized in order to maximize the actuation torque and minimize the power losses and the device volume. The optimization algorithms belong to the genetic class and, in particular, Migrated Parents - Non-Dominated Sorting Genetic Algorithm MP-NSGA, with three objective functions, is compared to NSGA-III.

Many Objective Optimization of a Magnetic Micro–Electro–Mechanical (MEMS) Micromirror with Bounded MP-NSGA Algorithm