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The fabrication of nanostructures with high resolution and precise control of the deposition site makes Focused Electron Beam Induced Deposition (FEBID) a unique nanolithography process. In the case of magnetic materials, apart from the FEBID potential in standard substrates for multiple applications in data storage and logic, the use of this technology for the growth of nanomagnets on different types of scanning probes opens new paths in magnetic sensing, becoming a benchmark for magnetic functionalization. This work reviews the recent advances in the integration of FEBID magnetic nanostructures onto cantilevers to produce advanced magnetic sensing devices with unprecedented performance.

Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology