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This investigation attempts to study a possible controller in improving the dynamic stability of capacitive microstructures through mitigating the effects of disturbances and uncertainties in their resultant dynamic behavior. Consequently, a nonsingular terminal sliding mode control strategy is suggested in this regard. The main features of this particular control strategy are its high response speed and its non-reliance on powerful controller forces. The stability of the controller was investigated using Lyapunov theory. For this purpose, a suitable Lyapunov function was introduced to prove the stability of a controller, and the singularity conditions and methods to overcome these conditions are presented. The achieved results proved the high capability of the applied technique in stabilizing of the microstructure as well as mitigating the effects of disturbances and uncertainties.

Applied Mechatronics: On Mitigating Disturbance Effects in MEMS Resonators Using Robust Nonsingular Terminal Sliding Mode Controllers