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It is well-known that cracks are observed around the impression during indentation of brittle materials. The cracks inception depends on load conditions, material and indenter geometry. The paper aims to use experimental micro-indentation data, FE simulations with cohesive zone modelling, and an optimisation procedure to determine the cohesive energy density of silicon single crystals. While previous studies available in the literature, which use cohesive zone finite element techniques for simulation of indentation cracks in brittle solids, tried to improve methods for the evaluation of material toughness from the indentation load, crack size, hardness, elastic constants, and indenter geometry, this study focuses on the evaluation of the cohesive energy density 2 Γ  from which the material toughness can be easily determined using the well-known Griffith-Irwin formula. There is no need to control the premise of the linear fracture mechanics that the cohesive zone is much shorter than the crack length. Hence, the developed approach is suitable also for short cracks for which the linear fracture mechanics premise is violated.

Determination of Mechanical and Fracture Properties of Silicon Single Crystal from Indentation Experiments and Finite Element Modelling