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Microelectromechanical systems (MEMS) are currently supportingground-breaking basic research in materials science and metallurgy as theyallow in situ experiments on materials at the nanoscale withinelectron-microscopes in a wide variety of different conditions such as extremematerials dynamics under ultrafast heating and quenching rates as well as incomplex electro-chemical environments. Electron-transparent sample preparationfor MEMS e-chips remains a challenge for this technology as the existingmethodologies can introduce contaminants, thus disrupting the experiments andthe analysis of results. Herein we introduce a methodology for simple and fastelectron-transparent sample preparation for MEMS e-chips without significantcontamination. The quality of the samples as well as their performance during aMEMS e-chip experiment in situ within an electron-microscope are evaluatedduring a heat treatment of a crossover AlMgZn(Cu) alloy.

A contamination-free electron-transparent metallic sample preparation method for MEMS experiments with in situ S/TEM