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Highly transparent indium-free multilayers of TiO 2 /Cu/TiO 2 were obtained by means of annealing. The effects of Cu thickness and annealing temperature on the electrical and optical properties were investigated. The critical thickness of Cu mid-layer with optimal electrical and optical properties was 10 nm, with the figure of merit reaching as high as 5 × 10 -3 Ω -1 . Partial crystallization of the TiO 2 layer enhanced the electrical and optical properties upon annealing. Electrothermal experiments showed that temperatures of more than 100 °C can be reached at a heating rate of 2 °C/s without any damage to the multilayers. The experimental results indicate that reliable transparent TiO 2 /Cu/TiO 2 multilayers can be used for electrothermal application.

Transparent TiO2/Cu/TiO2 Multilayer for Electrothermal Application