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We report on the MoO 3 oxides and their derivatives on microscopic 2H MoS 2 flakes oxidized in air and high relative humidity at a moderate temperature range below 410 °C. We combine XPS and AFM measurements such as topography, friction, creation of nanoscale ripples and scratches on the MoS 2 flakes deposited on Si substrates. We detect MoO 3 oxides mostly by measuring selected nanomechanical properties of the MoO 3 layer, such as its compressive mechanical stress at the plastic yield. We discuss basal surface coverage of the single MoS 2 flakes by the MoO 3 oxides. We discuss conditions for appearance of all possible MoO 3 oxide derivatives, such as molybdenum(VI) hydroxyoxides and MoO 3 hydrates. Our findings agree with an expected mechanistic switch in thermal oxidation in water vapors vs. air.

Surface-Bound and Volatile Mo Oxides Produced During Oxidation of Single MoS2 Crystals in Air and High Relative Humidity