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Optical sensing has attracted more and more attention in recent years with the advance in planar waveguide fabrication processes. The photon, as a carrier of information in sensing areas, could have a better performance than electrons. We propose a novel end-to-end ring cavity to fabricate sensitive units of a strain sensor. We then propose a method of combining a flexible substrate with an end-to-end semiconductor nanowire ring cavity to fabricate novel strain sensors. We used a tuning resonant wavelength detected by a homebuilt excitation and detection system to measure applied strain. The resonant wavelength of the strain gauge was red-shift and linear tuned with increasing strain. The gauge factor was about 50, calculated through experiments and theory, and Q was 1938, with structural parameters L = 70 µm and d = 1 µm. The high sensitivity makes it possible to measure micro deformation more accurately. End-to-end coupling active nanowire waveguides eliminate the shortcomings of side by side coupling structures, which have the phasing shift with no minor optical density loss. This resonator in flexible substrates could be used not only as on-chip strain sensors for micro or nano deformation detecting but also as tunable light sources for photonic integrated circuits.

Nanowire Ring Embedded in a Flexible Substrate for Local Strain Detection