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This report systematically investigates the influence of different carrier gases (O 2 , N 2 , and air) on the growth of gallium oxide (Ga 2 O 3 ) thin films on c-plane sapphire substrates by using the mist-CVD method. Although XRD and Raman measurements show that the pure corundum-structured α-Ga 2 O 3 with single (0006) plane orientation was successfully obtained for all three different carrier gases, the crystal quality could be greatly affected by the carrier gas. When O 2 is used as the carrier gas, the smallest full-width at half maximum (FWHM), the very sharp absorption cutoff edge, the perfect lattice structure, the highest growth rate, and the smooth surface can be obtained for the epitaxial α-Ga 2 O 3 film as demonstrated by XRD, UV-VIS, TEM, AFM (Atomic Force Microscope), and SEM measurements. It is proposed that the oxygen content in carrier gas should be responsible for all of these results. XPS (X-ray photoelectron spectroscopy) analysis also confirms that more oxygen elements can be included in epitaxial film when O 2 is used as the carrier gas and thus help improve the crystal quality. The proper carrier gas is essential for the high quality α-Ga 2 O 3 growth.

Influence of Carrier Gases on the Quality of Epitaxial Corundum-Structured α-Ga2O3 Films Grown by Mist Chemical Vapor Deposition Method